MKE118D-027力士乐

MKE118D-027

查找一般PLC故障的步骤是怎样的？

PLC维修时，插好编程器，并将开关拨到RUN位置，再根据下列步骤查找：

1）如果PLC停止在某些输出被激励的位置、状态（地方），一般是处于中间状态，则查找引起下一步操作发生的信号，编程器会显示信号的ON/OFF状态。

2）如果输入信号，将编程器显示的状态与输入模块的LED指示作比较，若结果不一致，则说明需要更换输入模块。更换模块前，需要先检查I/O扩展电缆和相关连接是否正常。

3）如果输入状态与输入模块的LED指示一致，则比较发光二极管与输入装置的状态。如果两者不同，则需要测量一下输入模块。如果发现存在问题，则需要更换I/O装置、现场接线、电源等。否则，需要更换输入模块。

4）如果信号是线圈，没有输出或输出与线圈的状态不同，则需要用编程器检查输出的驱动逻辑，并检查程序清单。

5）如果信号是定时器，并停在小于999.9的非零值上，则需要更换CPU模块。

6）如果该信号控制一个计数器，则需要先检查控制复位的逻辑，再检查计数器信号。然后检查、判断相关组件是否异常，需要更换。

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NOVA 210-40530-00 DAB Card Assembly, PCB,

401628

NOVA 210-40530-00 DAB Card Assembly, PCB,

401629

Nova PC Companion Plus, Cybex Communication

Reciever, 401047

Novascan 420, Nova 210-480001-01, AMAT

0650-01111 S/N 2050

Novascan 420, Nova 210-480001-01, AMAT

0650-01111 S/N 2307

Novellus / IPEC 0150-700366, Wafer head

gear motor right

Novellus / IPEC 2805-770376, Motion control

assy w Warner SS2000D6 Slo-Syn

Novellus / Porter TDEAT Flow control

assembly 0204956400 with NVL-012 1mL MFC

novellus 0100-772457, ELMO SBA-10/100EH,

amplifier, brushless DC motor

Novellus 01-4893 Arm, Wafer Clamp, Sierra

Novellus 02-00090-00, Heater Filter, Board,

FAB 27-00074-00, PCB Assy. 417319

novellus 02-034310-00 MOD CONT, P100/16M

Novellus 02-103960-00 Controller Platform

P166/64

Novellus 02-120820-00 Assembly, DEGAS,

Integrated, LDS, 420980

Novellus 02-120820-00 Assembly, DEGAS,

Integrated, LDS, 420981

Novellus 02-125859-01 Assy, Emitter, wafer

centering, with two Omron E3l-2LE4-50

Novellus 02-131736-00 Rev.A, ISIOC HI-LO

Transfer Assembly. 417234

Novellus 02-140949-00 Main system

start-stop module , S 1009

Novellus 02-140949-00 REV C Main system

start stop module

Novellus 02-147563-00 Air Manifold Box

Cover, 03-152126-00, 02-147563-00, 415772

Novellus 02-147563-00 Air Manifold Box

Cover, 03-152126-00, 02-147563-00, 415772

Novellus 02-147563-00 Bay Advanced

Technologies 8086-01 Air manifold assy

Novellus 02-158811-00 Main power panel w/

scrubbed exhaust for PVD REVC, S05001

Novellus 02-158811-00 Main system power

panel w/ scrubbed exhaust for PVD REV C

Novellus 02-172867-00 Air Manifold Box

Cover, 03-116024-00, 02-172867-00, 415771

Novellus 02-172867-00 Air Manifold Box

Cover, 03-116024-00, 02-172867-00, 415771

Novellus 02-257935-00 Assy, MC3E Platform

Controller with Ethernet, 417261

Novellus 02-266279-00 Rebuilt GAMMA 2130,

RF Match 8 Bolt, Kalrez with cal sheet

Novellus 02-267673-00 PVD preclean SIOC

controller, power supply, controller,

Novellus 02-273739-00 Rev.1, HDSIOC 1 PDL

OXIDE Firmware 4.72. 417235

Novellus 02-283808 gas manifold assy w

Brooks 5866RT MFC He 300 SCCM

Novellus 02-283868-00 Astec Power supply

MP8-2U-1Q-1Q-00-N602, MVP series

Novellus 03-00212-01, 1-1.B, Assembly,

Cable, LFCA, CA249. 418739

Novellus 03-00288-03 Rev.A, RF Cable

CA57-3. 418310

Novellus 03-00288-03 Rev.A, RF Cable

CA57-3. 418310

Novellus 03-137211-01 Turbo Pump Cable,

422790

Novellus 03-137211-01 Turbo Pump Cable,

422791

Novellus 03-299425-00 Backside Wafer

handling Interface xPRS PCB. FAB 26-299425

Novellus 03-810748-00 CVD-W Interlock PCB

Board, 76-10656-00, 27-10332-00 423316

Novellus 03-810748-00 CVD-W Interlock PCB

Board, 76-10656-00, 27-10332-00 423317

Novellus 04-121341-00 Kit, Heat Shield,

Speed-S, 17-121342-01, 401644

Novellus 04-121341-00 Kit, Heat Shield,

Speed-S, 17-121342-01, 401645

Novellus 04-121341-00 Kit, Heat Shield,

Speed-S, 17-121342-01, 401646

Novellus 04-708084-03 Ring, Insulator

Table, 329917

Novellus 04-709665-01 Plate, Mounting,

6", 420716

Novellus 04-709665-01 Plate, Mounting,

6", 420716

Novellus 04-710712-01, W94400420, 710712,

Plate Orfice. 418498

NOVELLUS 04-714510-02 BAY ADVANCED

TECHNOLOGIES BES 72801-02 PCB 198-2460 400578

NOVELLUS 04-714510-02 BAY ADVANCED

TECHNOLOGIES BES 72801-02 PCB 198-2460 400578

Novellus 04-716639-01 Shield, Hi Vac End

Chamber, Varian 0471663901, 420724

Novellus 04-716639-01 Shield, Hi Vac End

Chamber, Varian 0471663901, 420724

Novellus 04-716639-01 Shield, Hi Vacuum End

Chamber, Varian 0471663901, 420763

Novellus 04-716642-01 Shield, Side Chamber,

Varian 04-716642-01, 420752

Novellus 04-716850-01 Shield, Ceramic Ring

Upper, Varian 0471685001, 420773

Novellus 04-732024-01 Cable Assy, ESC, V,

P/2 50FT 401431

Novellus 06-678462-01 Cable Assembly,

419839

Novellus 06-688325-06 Cable Assembly,

Rotation Sensor, 419836

Novellus 0780-738673, Bayside

NR23S-010-025, Precision gear head 10:1

Novellus 08-23061-000 Bellow for Lift Pins

Novellus 10-157659-00 Chamber Blank off

plate, isolation valves, BB10-157659-00

Novellus 10-166693-00 Valve Manifold Assy,

416998

Novellus 10-287262-00 Tube Assembly, Teos

VAC/4LINE ISO VLV, RPC, C2S, 422601

Novellus 11332 Junction Box, 418583

Novellus 11332 Junction Box, 418583

Novellus 11332 Junction Box, 418584

Novellus 11332 Junction Box, 418584

Novellus 15-01107-00 Panel, LL, Side DCS

Novellus 15-055299-00, 15-054203-00,

Cassette Nest Assembly. 417189

Novellus 15-10676-00 Rev.X4, Blank Off Mesa

Flange, Chamber, Insert. 417349

Novellus 15-10676-00, Blank off Mesa

Flange, Chamber Spacer , Insert. 418247

Novellus 15-113290-00, 16-033537-00, Lift

Assembly, Compact Cylinder, 422240

NOVELLUS 16-126668-01 PVD UNIVERSAL

PRECISION SHIELD 15LB ESC TABLE GRIT 401487

NOVELLUS 17-121347-01 HEAT SHIELD, SPEED

401599

NOVELLUS 17-133076-00 PANEL PFEIFFER VACUUM

DISPLAY 401419

Novellus 22-055667-00 DN100 4"

Mechanism VAT 94842-R1, Gate Valve Insert, 422629

Novellus 22-055667-00 DN100 4"

Mechanism, VAT 94842-R1, Gate Valve, 420995

Novellus 22-055667-00 DN100 4"

Mechanism, VAT 94842-R1, Gate Valve, 420996

Novellus 22-055667-00 DN100 4"

Mechanism, VAT 94842-R1, Gate Valve, 420997

Novellus 22-117991-00, Advanced Energy

FC-7700CU MFC, 1 SLM, N2 Gas

Novellus 22-287806-00, Brooks

SLA7950S1EGG1B2A1, SMF, 0-1 SLPM, AR Gas

Novellus 27-00081-00 DC3 Power Supply,

Parker Compumotor, 418213

Novellus 27-00081-00, Power Supply, DC-4,

90 VDC, Parker Compumotor. 417382

Novellus 27-057877-00 Computer Display LCD,

Duraflo

Novellus 27-125993 Ebarra Genesis Cryo

controller, integrated, 642-1020

Novellus 27-127854-00, COSEL UAW500S-24,

Power supply, 24 V, 22A , NIB

Novellus 27-128501, Varian VPW 2870E4 Multi

range DC Sputtering Power Supply

Novellus 27-128501-00, Astec

MP1-2Q-2U-2U-00, 100W, 73-690-0024

Novellus 27-128714-00 Scientific

instruments Aqua trap 120-476

Novellus 27-159274-00 Hermos sys, RF ID

reader

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